VAMAS Surface Chemical Analysis Standard Data Transfer Format 1988 May 4
XI Ltd.
XI Spectral Data Processor
XI ASCII
Magnesium: Mg(2p), BE Cu(2p3) = 932.66 eV
1
0.05 eV/step, Sum of 15 repetitive etch/scans
NORM
REGULAR
1
0
0
0
0
0
1
0.05 eV/step, Sum of 15 repetitive etch/scans
Magnesium: Mg(2p), BE Cu(2p3) = 932.66 eV
2003
4
28
23
25
22
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
14.21
1
0
0
1000
2000
55
0
data_1
data_1
-1
Binding energy
eV
60
-0.05
2
counts
d
Transmission
d
pulse counting
0.1
48
4.00E-06
0
0
0
0
802
15
669
0.371827
0.374424
142
0.374424
135
0.374418
113
0.374411
126
0.374404
126
0.374398
119
0.374391
104
0.374385
109
0.374378
95
0.374372
87
0.374365
95
0.374359
66
0.374352
97
0.374345
84
0.374339
65
0.374332
91
0.374326
92
0.374319
68
0.374313
76
0.374306
68
0.3743
78
0.374293
82
0.374286
61
0.37428
61
0.374273
80
0.374267
74
0.37426
60
0.374254
73
0.374247
78
0.374241
69
0.374234
74
0.374227
80
0.374221
68
0.374214
68
0.374208
83
0.374201
74
0.374195
56
0.374188
63
0.374182
61
0.374175
63
0.374169
80
0.374162
67
0.374155
75
0.374149
60
0.374142
78
0.374136
63
0.374129
67
0.374123
61
0.374116
63
0.37411
67
0.374103
64
0.374097
47
0.37409
56
0.374083
70
0.374077
66
0.37407
62
0.374064
71
0.374057
64
0.374051
58
0.374044
76
0.374038
77
0.374031
71
0.374025
46
0.374018
61
0.374011
63
0.374005
76
0.373998
70
0.373992
61
0.373985
62
0.373979
63
0.373972
60
0.373966
65
0.373959
72
0.373953
64
0.373946
61
0.37394
68
0.373933
53
0.373927
69
0.37392
51
0.373913
47
0.373907
50
0.3739
54
0.373894
61
0.373887
43
0.373881
53
0.373874
66
0.373868
65
0.373861
50
0.373855
49
0.373848
53
0.373842
49
0.373835
41
0.373829
55
0.373822
50
0.373815
53
0.373809
55
0.373802
44
0.373796
48
0.373789
52
0.373783
57
0.373776
63
0.37377
43
0.373763
44
0.373757
38
0.37375
49
0.373744
53
0.373737
51
0.373731
52
0.373724
45
0.373718
52
0.373711
35
0.373704
54
0.373698
44
0.373691
52
0.373685
58
0.373678
40
0.373672
50
0.373665
46
0.373659
35
0.373652
41
0.373646
54
0.373639
46
0.373633
54
0.373626
45
0.37362
44
0.373613
51
0.373607
42
0.3736
42
0.373594
61
0.373587
38
0.373581
56
0.373574
50
0.373568
67
0.373561
44
0.373555
40
0.373548
47
0.373542
47
0.373535
37
0.373528
55
0.373522
53
0.373515
42
0.373509
53
0.373502
48
0.373496
41
0.373489
44
0.373483
56
0.373476
52
0.37347
39
0.373463
51
0.373457
50
0.37345
45
0.373444
48
0.373437
44
0.373431
46
0.373424
32
0.373418
54
0.373411
48
0.373405
42
0.373398
45
0.373392
63
0.373385
60
0.373379
57
0.373372
59
0.373366
62
0.373359
51
0.373353
55
0.373346
67
0.37334
67
0.373333
68
0.373327
61
0.37332
54
0.373314
60
0.373307
55
0.373301
75
0.373294
73
0.373288
64
0.373281
65
0.373275
81
0.373268
77
0.373262
84
0.373255
65
0.373249
71
0.373242
85
0.373236
83
0.373229
72
0.373223
100
0.373216
100
0.37321
87
0.373203
76
0.373197
95
0.37319
88
0.373184
119
0.373177
114
0.373171
118
0.373164
145
0.373158
132
0.373151
162
0.373145
185
0.373138
237
0.373132
224
0.373125
289
0.373119
339
0.373112
397
0.373106
398
0.373099
474
0.373093
534
0.373086
584
0.37308
620
0.373073
669
0.373067
589
0.37306
538
0.373054
415
0.373047
343
0.373041
214
0.373034
166
0.373028
92
0.373021
88
0.373015
36
0.373008
40
0.373002
37
0.372995
27
0.372989
28
0.372982
30
0.372976
30
0.372969
25
0.372963
29
0.372957
34
0.37295
21
0.372944
28
0.372937
29
0.372931
32
0.372924
19
0.372918
43
0.372911
21
0.372905
38
0.372898
28
0.372892
38
0.372885
24
0.372879
27
0.372872
36
0.372866
22
0.372859
27
0.372853
15
0.372846
24
0.37284
30
0.372833
29
0.372827
33
0.37282
30
0.372814
39
0.372807
18
0.372801
34
0.372795
38
0.372788
25
0.372782
21
0.372775
24
0.372769
28
0.372762
28
0.372756
29
0.372749
24
0.372743
38
0.372736
28
0.37273
31
0.372723
33
0.372717
33
0.37271
20
0.372704
42
0.372697
23
0.372691
33
0.372684
28
0.372678
27
0.372672
29
0.372665
21
0.372659
30
0.372652
27
0.372646
29
0.372639
32
0.372633
25
0.372626
26
0.37262
26
0.372613
30
0.372607
28
0.3726
31
0.372594
33
0.372587
18
0.372581
33
0.372575
25
0.372568
24
0.372562
37
0.372555
38
0.372549
25
0.372542
29
0.372536
29
0.372529
28
0.372523
29
0.372516
29
0.37251
19
0.372503
35
0.372497
25
0.372491
25
0.372484
27
0.372478
21
0.372471
31
0.372465
29
0.372458
19
0.372452
28
0.372445
28
0.372439
35
0.372432
34
0.372426
41
0.372419
33
0.372413
36
0.372407
38
0.3724
28
0.372394
29
0.372387
29
0.372381
20
0.372374
28
0.372368
21
0.372361
39
0.372355
22
0.372348
31
0.372342
34
0.372336
31
0.372329
33
0.372323
26
0.372316
27
0.37231
28
0.372303
29
0.372297
19
0.37229
34
0.372284
35
0.372277
36
0.372271
30
0.372265
30
0.372258
30
0.372252
29
0.372245
21
0.372239
32
0.372232
29
0.372226
34
0.372219
41
0.372213
20
0.372207
35
0.3722
23
0.372194
31
0.372187
23
0.372181
30
0.372174
31
0.372168
31
0.372161
28
0.372155
22
0.372149
40
0.372142
36
0.372136
19
0.372129
28
0.372123
33
0.372116
28
0.37211
31
0.372103
29
0.372097
33
0.372091
17
0.372084
30
0.372078
36
0.372071
32
0.372065
25
0.372058
33
0.372052
23
0.372046
34
0.372039
18
0.372033
28
0.372026
26
0.37202
28
0.372013
17
0.372007
27
0.372
47
0.371994
32
0.371988
28
0.371981
38
0.371975
28
0.371968
29
0.371962
27
0.371955
35
0.371949
32
0.371943
34
0.371936
32
0.37193
24
0.371923
28
0.371917
23
0.37191
29
0.371904
30
0.371898
29
0.371891
26
0.371885
23
0.371878
30
0.371872
33
0.371865
28
0.371859
31
0.371853
29
0.371846
24
0.37184
22
0.371833
23
0.371827
end of experiment
